This is a systematic review on particle beam including proton and carbon ion therapy for primary or recurrent nasopharyngeal cancer (NPC). Twenty-six eligible studies with a total of 1502 patients were included. The pooled OS at 1-year, 2-year and 3-year and 5-year for primary NPC patients who received particle beam therapy were 96 %, 93 %, 90 % and 73 % respectively. The pooled 1-year and 2-year PFS, and LC for these patients were above 90 %. For locally recurrent NPC patients, the 1-year OS rate ranged from 65 % to 92 %, while the 1-year LC rate ranged from 80 % to 88 %. Late toxicity ≥G3 was 20 % or less. The review concluded that particle therapy produced excellent survival outcomes with low toxicity.