This systematic review and meta-analysis included 34 comparative studies and evaluated the effectiveness of carbon ion radiotherapy (CIRT) in patients with various types of solid tumors including glioblastoma, chondroma, and chordoma, lung, liver, prostate, rectal, and cervical cancers. This meta-analysis reported that LC rate in the CIRT group was higher than that in the photon therapy group, but slightly lower than that in the proton radiation therapy (PRT) group. Additionally, the CIRT group had significantly higher OS and PFS compared to the photon group, while survival rates were similar between the CIRT and PRT groups.